Analysis of diffraction by surface-relief crossed gratings with use of the Chandezon method: application to multilayer crossed gratings
نویسنده
چکیده
A new formulation of the Chandezon method for crossed gratings is presented. In the nonorthogonal translation coordinate system, an arbitrary field in a homogeneous source-free region can be expressed as the sum of a TE field and a TM field. It is shown that the whole solution can be derived from the eigensolutions of an operator independent of the polarization. In addition, use is made of the S-matrix formalism to include multilayer coated crossed gratings with parallel faces. Numerical results are given for sinusoidal crossed gratings and pyramidal gratings. © 1998 Optical Society of America [S0740-3232(98)02005-5] OCIS codes: 0050.2770, 050.1940.
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